W‐Band High‐Efficiency Waveguide Slot Array Antenna with Low Sidelobe Levels Based on Silicon Micromachining Technology

A high-efficiency waveguide slot array antenna with low sidelobe level (SLL) is investigated for W-band applications. The silicon micromachining technology utilized to realize multilayer architecture by three key steps of selective etching, gold plating and Au-Au bonding. radiating based on this technique becomes thick a minimum thickness 0.2 mm accompanies the decrease slot's radiation ability. To overcome weakness, stepped cavity loaded slot. characteristic cavity-loaded synthesize low-SLL antenna. unequal hybrid corporate feeding network constructed achieve suppression in E-plane. pair 16 × 8 high-effciency arrays fashioned confirmed experimentally. bandwidth effciency higher than 80% 92.3–96.3 GHz. SLLs both E- H-planes are below −19 dB.